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Formulation of Engineered Particulate Systems for Chemical Mechanical Polishing Applications

Permanent Link: http://ufdc.ufl.edu/UFE1001115/00001

Material Information

Title: Formulation of Engineered Particulate Systems for Chemical Mechanical Polishing Applications
Physical Description: Mixed Material
Copyright Date: 2008

Record Information

Source Institution: University of Florida
Holding Location: University of Florida
Rights Management: All rights reserved by the source institution and holding location.
System ID: UFE1001115:00001

Permanent Link: http://ufdc.ufl.edu/UFE1001115/00001

Material Information

Title: Formulation of Engineered Particulate Systems for Chemical Mechanical Polishing Applications
Physical Description: Mixed Material
Copyright Date: 2008

Record Information

Source Institution: University of Florida
Holding Location: University of Florida
Rights Management: All rights reserved by the source institution and holding location.
System ID: UFE1001115:00001