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Radiative Modeling in Rapid Thermal Processing for Accurate Wafer Temperature Measurement

Permanent Link: http://ufdc.ufl.edu/UFE1000173/00001

Material Information

Title: Radiative Modeling in Rapid Thermal Processing for Accurate Wafer Temperature Measurement
Physical Description: Mixed Material
Copyright Date: 2008

Record Information

Source Institution: University of Florida
Holding Location: University of Florida
Rights Management: All rights reserved by the source institution and holding location.
System ID: UFE1000173:00001

Permanent Link: http://ufdc.ufl.edu/UFE1000173/00001

Material Information

Title: Radiative Modeling in Rapid Thermal Processing for Accurate Wafer Temperature Measurement
Physical Description: Mixed Material
Copyright Date: 2008

Record Information

Source Institution: University of Florida
Holding Location: University of Florida
Rights Management: All rights reserved by the source institution and holding location.
System ID: UFE1000173:00001