Title: MAIC newsletter
Full Citation
Permanent Link: http://ufdc.ufl.edu/UF00091100/00003
 Material Information
Title: MAIC newsletter
Series Title: MAIC newsletter
Physical Description: Serial
Language: English
Creator: Major Analytical Instrumentation Center, College of Engineering, University of Florida
Publisher: Major Analytical Instrumentation Center, College of Engineering, University of Florida
Place of Publication: Gainesville, Fla.
Publication Date: October 2002
 Record Information
Bibliographic ID: UF00091100
Volume ID: VID00003
Source Institution: University of Florida
Holding Location: University of Florida
Rights Management: All rights reserved by the source institution and holding location.


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X-ray reflectivity:
a new techniquefor thin
film measurements

By V Craciun

The X'Pert MRD is an excellent tool
for the measurement of the x-ray
reflectivity (XRR) of thin films. A
specially designed high intensity x-
ray tube in combination with cutting
edge optical components results in
an incident beam of 3.0x107 counts/s
with a remarkably low divergence of
0.0030. The X'Pert MRD system
allows for the generation of high-
resolution XRR spectra of thin films
deposited on a variety of substrates
over a range of 0.1 7. Sample
alignment can be completed in only
30 min with a one-hour acquisition
time for a high resolution XRR



Sio Irt) I6A 4A 2
O 4A IA 9'

2 3 4

spectrum. A typical XRR spectrum
acquired from a thin film of HfO2
deposited on Si by laser ablation is
shown in the figure below. The
acquired spectrum has been modeled
using the Philips Wingixa software
package. Features of the XRR
spectrum such as the critical angle,
periodicity of oscillation and their
amplitude are directly related to the
density, thickness and roughness of
the actual structure. Example results
obtained from modeling are
displayed in the inset below.
To date, Dr. Rajiv Singh's group has
been the major user of this
technique allowing them to
characterize the thickness and
properties ofhigh-k dielectric layers
deposited on Si [1, 2]. To find out
more about XRR please contact Dr.
V. Craciun at vcrac@mse.ufl.edu.

1. J. M. Howard et al.,
S(m in press, Appl. Phys. Lett.
82 (18), (2002)
2. N. D. Bassim et al.,
in press, Appl. Surf. Sci.

Typical XRR spectra of
Hf02 thin film with
modeled data shown in

Direto' C Lrnerihty L.A. LDimpere

MA I sinfiateub e of rauae stutents/mseisflredua: E-ma r thecourse Scanning


Major Analytical Instrumentation Center
107 MEL, PO Box 116400, Gainesville, FL 32611
Phone:(352) 392-6985 Fax:(352) 392-0390

Dr. Valentin Craciun
XRD and Associated

Dr. Valentin Craciun has joined the
faculty of the MAIC in the area of
X-ray Diffraction and associated
techniques. He earned his Ph.D. in
technical physics at the Polytechnic
University Bucharest in Romania
conducting laser surface studies for
microelectronics applications. He
was then a research fellow at the
University College London where
he studied the pulsed laser
deposition of oxide films and UV-
assisted low temperature oxidation
of semiconductors.
Valentin also worked as a visiting
scientist at the University of
Orleans, France, where he
investigated the role of laser
plasmas for thin films processing.
Eventually, he returned to Bucharest
as a senior researcher at the National
Institute for Laser, Plasma, and
Radiation Physics. In 1998, he
became a visiting scholar at UF in
the group led by Dr. Rajiv Singh.
Valentin has co-authored more than
100 scientific journal articles and
communications, presented eight
invited talks, chaired sessions at
European Materials Research
Society (E-MRS) meetings and
served on the scientific committee
of several conferences. He has been
a referee for Applied Physics
Letters, Journal of Applied Physics,

IEEnE information:

Lab: MEL, [,(0AIC 118

Thin Solid Films, Journal of
Materials Research, and several
other joumals.
In June 2002, Valentin co-organized
the E-MRS Symposium on Physics
and Chemistry of Advanced Laser
Materials Processing. In 2003, he is
co-organizing a NATO-Advanced
Study Institute on laser processing
of biological tissues and
biocompatible materials.
At MAIC, he is teaching a class this
fall on the use of x-ray diffraction
techniques for thin films analysis
and plans to teach an advanced class
for the characterization of epitaxial
films (high resolution rocking
curves, pole figures, phi scans,
space maps) next semester. His
future plans include collaboration
with faculty members who grow and
process thin films and, together with
colleagues from MAIC, the
preparation of a new class about the
metrology of nanometer-thin films
and structures.

Spring 2003 Courses
Special Research

The topics to be covered by the
Specialized Research Techniques in
Materials Science, course EMA
6919L (2 Credits), in the Spring
2003 are: X-Ray Photoelectron
Spectroscopy (XPS)(Instructor: Eric
Lambers) and the new course X-ray
characterization of epitaxial films
(Instructor: Dr. Valentin Craciun).
Both courses include theory and
training. Training on XPS will be on
the PHI 5100 ESCA system and the
Kratos ESCA XSAM 800. Training
of XRD course will be on the
Phillips X'Pert MRD diffractometer.

Conferences 2002-2003

The Microscopy and Microanalysis
2002 meeting this year was hosted
by the Microscopy Society of
Canada in Quebec City, Canada.
This conference was jointly
sponsored by the Microscopy
Society of America (MSA), the
Microbeam Analysis Society (MAS)
and the International Metallographic
Society. MAIC was represented at
this conference with a poster entitled
"Characterization of the effects of
particle size on the microstructure
ofMoSi2-TiB2 composites produced
by elemental in-situ reactions using
SEM and EPMA ".
Microscopy and Microanalysis 2003
will be held in San Antonio, Texas
on August 2003 jointly with the
meeting of Committee of Inter-
American Societies for Electron
Microscopy (CIASEM).
The 2003 Annual Symposium of the
Florida Chapter of the American
Vacuum Society and the Florida
Society for Microscopy will take
place on March 17-18, 2003 at the
Student Union Building of the
University of Central Florida in
Orlando. The deadline for abstract
submission will be announced soon.
The symposium will include
technical sessions, a student poster
competition, short courses and
equipment exhibit with local and
national vendors.

Th I w

MAIC POLICIES CORNER: Using MAICfacilities after hours
MAIC facilities can be used after hours and weekends by qualified/authorized users of the MAIC
instrumentation. We recommend students do not work alone in the building. Also, do not unlock building
access doors after hours or weekends. Report any suspicious activity as soon as possible. For more
information on safety and security rules, the student guide for campus safety & security can be found at:
http://www.dso.ufl.edu/stg/Police-Services.html I

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